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Electron Beam Evaporation
Electron beam evaporation is commonly used for insulating and resistor films for electronic components as well as optical anti-reflection coatings and filters. In this technology the coating material is evaporated by an electron beam from a water-cooled crucible. Multi-layer coatings can be deposited in one duty cycle.
PLANSEE USA supplies:
- Crucibles made of Mo, TZM, W and Ta
- Emission cathodes
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